Essential details
Shipping:Express delivery
Product Introduction
| 1. Wafer specification | 1. Wafer size | 8inch/12inch |
| 2. Temperature range | 2. Temperature range | Max 450 °C |
| 3. Vacuum | 3. Vacuum | |
| 4. Temperature uniformity | 4. Temperature uniformity | ±1% |
| 5. Loadlock | 5. Loadlock zone | 1 |
| 6. Heating zone | 6. Heating zone | 3 |
| 7. Cooling zone | 7. Cooling zone | 2 |
| 8. Cooling method | 8. Cooling way | Water cooling |
| 9. Heating plate material | 9. Heating plate material | |
| 10. Equipment weight | 10. Weight | |
| 11. Equipment dimensions | 11. Size | |
| 3. Power supply: | 12. Power supply | 380V 50HZ |